> How many euv lithography machines are there in the world?

As of mid-2026, ASML—the world's sole producer of extreme ultraviolet (EUV) lithography systems—has shipped approximately 315 EUV machines globally. These multi-billion-dollar systems are exclusively operated by a handful of leading semiconductor manufacturers, primarily Taiwan Semiconductor Manufacturing Co. (TSMC), Samsung, Intel, and SK Hynix.

The total installed base is roughly distributed as follows:

•    Low-NA EUV Systems: The vast majority of the fleet (around 310 units) consists of Low-NA systems (e.g., the NXE:3600D), which cost upward of $200 million each.
•    High-NA EUV Systems: Only a small number of next-generation High-NA systems have been shipped for advanced R&D and pilot manufacturing. The first commercial installation occurred at Intel's Oregon facility in 2024, with systems priced around $380 million.

Because these machines are vital for etching the sub-10 nanometer transistors found in advanced AI and smartphone processors, their distribution is heavily regulated. You can track ASML's quarterly system shipments and ongoing capacity ramp-ups directly on the ASML EUV Lithography Systems platform.